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25SLPM Gas Flow Meter

25SLPM Gas Flow Meter

25SLPM Gas Flow Meter

25SLPM 1.5%FS Gas Flow Meter

MEMS 25SLPM Gas Mass Flow Meter

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Product Details
Product Name:
High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~ 25slpm
Flow Range:
0-10, 0-25L/Min, 0-200L/min
Power Supply:
Battery Or 5-12VDC Adapter
Screw Thread:
R1/4,BSPT1/4, 4mm,6mm,8mm,12mmquick Coupling
12 Months
Air @ 20℃, 101.325 KPa
RS 485 Or Optional
Payment & Shipping Terms
Minimum Order Quantity
USD239.00 ~ USD245.00/set
Packaging Details
Polywood box packing
Delivery Time
5 ~ 8 working days after payment
Payment Terms
L/C, T/T, Western Union, MoneyGram PayPal
Supply Ability
Product Description

High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~ 25slpm



The MF4001 mass flow sensors are manufactured using Shelok proprietary MEMS flow sensor and package technology. The sensor are specially designed for low flow rate range applications from 0~30 sccm up to 0~1000 sccm. The maximum flow rate for each model is manufactured via specially designed package as well as smart electonics so that the optimal sensitivity would be achieved.


The packaging enclosure is made of the chmically inert and thermally stable polycarbonate material. The maximum over pressure rating is 5 bar (73 psi) that is benefitted from Shelok unique MEMS Sensor chip structure, special packaging technology and the rugged sensor housing.




High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~ 25slpm
Model Value Unit
Flow Range 0~30, 100, 200, 500, 1000, or customer specified sccm
Turn-down Ratio >100:1
Accuracy1 ±(1.5+0.5 FS) %
Repeat ability ±0.25 % Reading
Null Shift ±30 mV
Output Shift ±0.2 %/℃
Response Time2 65 (Default, 4, 8, 16, 33, 131 selectable ms
Output Linear: I2C, Analog 0.5~4.5V DC
Pressure Drop3 <350 Pa
Pressure Range -0.08 ~ +0.5 MPa
Power Supply4 8~24 V DC, 20mA
Power Consumption <120 mW
Working Temperature -10 ~ +55
Pins Out 5 Pin, 2.54mm centers, 0.635 mm square
Calibration5 Air @ 20℃, 101.325 kPa
Packaging Material Polycarbonate
Dimensions 62×52×12.8 mm3
Weight 15 g
Storage Temperature -20 ~ +65
Humidity <95 % RH (No icing or condensation


1. Denotes ±(1.5% Reading+0.5% Full Scale). To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.

2. The response time is determined by ADC Sampling rate and data process algorithm. The default response time is 65 ms. It can be programmed via RS232 communication.

3. The maximum pressure drop is measured at flow rate 1000 sccm. For 500 sccm flow sensors, the pressure drop will be smaller. For 30, 100 and 200 sccm flow sensors, the flow pipe will be smaller, and the maximum pressure drop is <20 Pa at flow rate 200 sccm.

4. One DC power supply is necessary. The required minimum output current is 50mA. The sensor actually consumes less than that in operation.

5. Calibrations at other gases available upon request.


Detailed Images



Mechanical Dimensions

Selection (1).jpg

Sensor Selection

Selection (2).jpg


! Low mass flow range from 0~30 sccm up to 0~1000sccm

! Outstanding Accuracy of ±1.5%

! Fast response (4 ms selectable)

! R Pressure rating up to 5 bar (73 psi)

! Analog and / or digital user interface

! Easy installation



The MF4001 can be used in a wide range of applications inculding instrumentation(e.g. GC mass spectrometry), leak detection, process control, gas flow metrology as well as medical applications. The MF4001 requires a power supply of 8~24V DC and provides an analog and/or digital user interface. The analog output is linearized from 0.5 to 4.5V DC corresponding with flow rate from 0 to full scale. The digital output is via RS232/12C. The communication protocol of the RS232 and I2C can be found in this manual.

The calibration is generally performed with nitrogen at 20℃ and 101.325kPa pressure rating. It can nonetheless be calibrated with other gases and conditions upon requests.

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Q: How long will you reply me?

A: We will contact you as soon as possible but within 12 hours

Q: Can I get some samples?

A: Yes, Sample order is available for quality check and market test. But you have to pay the express cost.

Q: How soon can you arrange your production?

A: Once getting your product confirmation and receiving the prepayment, the production will be started immediately.

Q: What's delivery time?

A: It usually takes about 3-5 working days for small order and 10-15 days for big order.

Q: How do you control your quality ?

A: Three inspection steps(of original, production, and finished goods) + good warranty service(1 year free to change a new one without any human damage factors).

Q: What certificates do you have ?

A: ISO9000, CE, Explosion-proof certification, RoHs ready. And before the delievry of goods, quality and safety inspection certification issued by third parts also can be offered.

Q: Could I visit your factory?

A: Very welcome! Fly to Xian Yang air port. It was a big pleasure for us.

Q: What's your warranty terms?

A: We offer 12 months warranty time.

Q: can you provide OEM & Customized service?

A: Yes, OEM and ODM are both available, we have the professional R&D dept which can provide professional solutions for you.

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